Small Ozone Generator

OZ-150

OZ-150 special type oxygen generator
Ozone production(g/hr)
150
Regular ozone concentration (g/㎥)
over 140
Power consumption (kW)
3
Power specification (V,Hz)
220, 60
Weight of a product (kg)
water cooling
Size(W*D*H(mm))
900x600x1485
Applications
  • Semiconductor processSemiconductor process

· Cooling method : water cooling

· Flow meter : 25LPM

· Control of ozone concentration : control of flow and volume of oxygen

· Display device : 1.power : LED display / 2.flow meter : control of flow of oxygen

· Control of ozone production : control of flow and volume of oxygen

· Inlet,Oulet Fitting : 1.GAS : 6mm / 2.Water : 10mm

· Main material of enclosure : SUS304